Rotary Table EZ-0779
EITZENBERGER air bearing round tables are available as round tables without motors and measuring systems (passive round tables) and as direct drive round tables with integrated motor and measuring system (active round tables). Highly precise axes have concentricity errors up to 50 nm radial and up to 20 nm axial. The wide variety of round tables also makes them suitable for chip removal operations. We would be happy to advise you.
Description
The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct-drive rotary table is equipped with a powerful water-cooled torque motor.
Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated.
The measuring system (Numerik Jena RIK4) with 18,000 lines can be used with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability.
There are no restrictions regarding the installation position.
Key Features
- Air Bearing Rotary Table with Direct Drive
- Load Capacity axial 3000 N
- Runout < 0.1 µm
- Velocity 500 U/min
- Water-cooled Motor
Applications
Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy
Documentation
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