Round Table EZ-0275
EITZENBERGER air bearing round tables are available as round tables without motors and measuring systems (passive round tables) and as direct drive round tables with integrated motor and measuring system (active round tables). Highly precise axes have concentricity errors up to 50 nm radial and up to 20 nm axial. The wide variety of round tables also makes them suitable for chip removal operations. We would be happy to advise you.
Description
The EZ-0275 Round Table is an air-lubricated bearing with direct drive mechanism. The drive mechanism operates optionally by means of a fixed centrode-free 2- or 3-phase synchronous motor; the angle measurement through an angle transmitter with 18,000 steps per revolution. The concentricity error is 200 nm radial and 100 nm axial. Load capacity 600 N axial and 300 N radial.
Key Features
▪ Air Bearing Rotary Table with Direct Drive
▪ Radial Runout < 0.1 µm
▪ Angular Accuracy < ±0.5 arcsec
▪ 660 U/min in Standard Version
▪ 1 Vpp or with Interpolation (5x, 10x, 50x, 100x)
Applications
High-precision positioning and measuring systems, inspection technology, testing systems, calibration systems, optical alignment, applications with high demands on synchronization and/or repeatability of positioning.